EVG420EVG 420 Mask Aligner (Upgraded from a 420)
Model: EVG420 (Upgraded from a 420)
- Manual Mask Aligner
- Topside Alignment (TSA)
- Backside Ailgnment (BSA)
- Automatic Alignment
- Up to 6"/150mm Wafer Capable (with proper chuck)
- Objectives (Qty 2)
- Vacuum Chuck: request at time of order
- Maskholder: request at time of order
- Mask Load Frame: request at time of order
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact
Exposure Modes
- Tooling Exchanges are